PTB offers a variety of measurement services in the VUV and EUV spectral ranges. The seminar is aimed at facilitating the exchange of ideas between partners from science and industry. The seminar topics include metrological developments and applications in the VUV and EUV spectral ranges in various fields such as optical industry, lithography, and astrophysics.

Previous seminars: 2011, 2013

Questions about further information may be addressed to: euv2015

V. Banine, Director Research ASML
A. Gatto, Director Microstructured Optics Carl Zeiss Jena GmbH

T. Feigl, optixfab H. Enkisch, Carl Zeiss SMT AG A. Ullrich, AMTC A. Meseck, HZB
L. Juschkin, RWTH Aachen V. Holy, Charles University Prague U. Arp, NIST
M. Caldwell, STFC RAL R. Schäfer, Fraunhofer IPM Freiburg Y. Ekinci, Paul Scherrer Institut

The seminar will run from Thursday November 5^th, 2015, 10 a.m. to Friday November 6^th, 2015, 4 p.m.
A dinner buffet will take place on Thursday evening.

The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.