PTB offers a variety of measurement services in the VUV and EUV spectral ranges. The seminar is aimed at facilitating the exchange of ideas between partners from science and industry. The seminar topics include metrological developments and applications in the VUV and EUV spectral ranges in various fields such as optical industry, lithography, and astrophysics.

Previous seminars: Opens external link in new window2011, Opens external link in new window2013

Questions about further information may be addressed to: Opens window for sending emaileuv2015

Invited Speakers

V. Banine, Director Research ASML
A. Gatto, Director Microstructured Optics Carl Zeiss Jena GmbH

T. Feigl, optixfab H. Enkisch, Carl Zeiss SMT AG A. Ullrich, AMTC A. Meseck, HZB
L. Juschkin, RWTH Aachen V. Holy, Charles University Prague U. Arp, NIST
M. Caldwell, STFC RAL R. Schäfer, Fraunhofer IPM Freiburg Y. Ekinci, Paul Scherrer Institut


The seminar will run from Thursday November 5th, 2015, 10 a.m. to Friday November 6th, 2015, 4 p.m.
A dinner buffet will take place on Thursday evening.


The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from KurfĂĽrstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

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